Kerr frequency combs have been attracting significant interest due to their rich physics and broad applications in metrology, microwave photonics, and telecommunications. In this review, we first introduce the fundamental physics, master equations, simulation methods, and dynamic process of Kerr frequency combs. We then analyze the most promising material platform for realizing Kerr frequency combs—silicon nitride on insulator (SNOI) in comparison with other material platforms. Moreover, we discuss the fabrication methods, process optimization as well as tuning and measurement schemes of SNOI-based Kerr frequency combs. Furthermore, we highlight several emerging applications of Kerr frequency combs in metrology, including spectroscopy, ranging, and timing. Finally, we summarize this review and envision the future development of chip-scale Kerr frequency combs from the viewpoint of theory, material platforms, and tuning methods.

集成光子芯片是将激光光源、低损耗波导、调制器、探测器等多类光电器件结合在一起，实现功能化集成，在高速光通讯、量子信息处理、光学传感等领域有具有重要的应用。然而由于不同的光电器件基于不同材料体系，实现多材料体系的光电器件集成极其困难。传统的异质集成和单片集成方法难以同时解决定位精度不足、低拓展性、高损耗、低带宽等一系列问题。基于飞秒激光的双光子聚合技术具有高精度和高穿透的优势，可以实现多材料体系的片上微纳光学元件增材制造，具有极高的加工自由度。本文对片上光学元件的激光增材制造这一领域进行综述，探讨了光子引线键合和微空间光路元件两种技术路径，总结了现有技术的发展现状，并对未来的发展前景进行了展望。

超快激光是指脉冲宽度极窄的激光，其瞬时功率极高，与物质之间的相互作用呈现出非线性、非平衡、多尺度的状态。超快激光具有超快（脉冲持续时间短）、超强（瞬时功率高）、超精细（加工结构精细）等特点，由此实现的非线性激光制造技术可以打破传统微纳制造的局限，实现各类难加工材料和复杂微纳结构的超精细制造，精度可达亚微米至纳米量级，在微光学、生物医学、智能电子器件等前沿领域体现出了独特的应用价值。文中主要聚焦飞秒激光微纳加工技术前沿，简要概括了飞秒激光加工的特点；介绍了飞秒激光加工的主要技术手段，包括飞秒激光直写和飞秒激光并行加工；讨论了飞秒激光加工技术的前沿应用领域，如微纳光学器件、微流体器件、多功能结构化表面、生物医学工程等；最后，对飞秒激光加工制造技术未来的发展趋势和研究方向进行展望。